Introduction to New Scanning Probe Microscopy (SPM) and Scanning Electron Microscopy (SEM) Related Imaging Techniques
LiteScopeTM is a unique scanning probe microscope (SPM). It is designed for easy integration into a variety of scanning electron microscopes (SEM). Combining complementary SPM and SEM techniques enables them to take advantage of both. With LiteScopeTM and its interchangeable probe series, complex sample analysis, including surface topography, mechanical properties, electrical properties, chemical composition, magnetic properties, etc., can be easily performed.

Related probes and Electron MicroscopyTM (CPEM) combine SPM and SEM techniques. CPEM can simultaneously acquire SPM and SEM images of the same area in the same coordination system. A combination of SPM and SEM imaging methods yields a broader spectrum of information for the analysis region, revealing possible equivalence and inconsistency in both images .

working principle
Connect the sample to the piezoelectric scanner. SPM probe and the electron beam focus during image acquisition can CPEM region of interest point by a piezoelectric scanner and scanning signals, while the SEM and SPM probe detector sampled for the measurement in the same Coordination in the system. There is a constant between the tip and the SPM focused electron beam within the range tip / point offset hundreds of nanometers. If such a tip/point offset is subtracted, the SEM and SPM images have a perfect match and excellent correlation - a CPEM image can be acquired.


Technical advantages CPEM
1. CPEM provides multidimensional correlation imaging - images from scanning electron microscopes are expanded to 3D .
2. Using CPEM, you can quickly and accurately distinguish terrain and material contrast in SEM images .
3. The CPEM associates two or more SEM signals with the measured terrain in an appropriate manner, such as SE, BSE, EBIC, and the like .
4. CPEM can simultaneously measure AFM and SEM sample conditions under the same conditions, the same measurement speed, etc.
5. Combined AFM and SEM scanning systems enable precise image correlation, eliminating drift and other inaccuracies .

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